Fujitsu CS90A Manuel d'utilisateur télécharger pdf (Page 2)

130nm node CMOS Process (CS90A)

5-Cu

6-Cu

7-Cu

1-Cu

2-Cu

3-Cu

4-Cu

SiL

SiO2

Global Metal:

AL (Fuse & Pad)

Pitch: 1.8µm

Semi Global Metal:

Thick Cu + SiO2

Pitch: 0.6µm

Intermediate Metal:

Thin Cu + SiLK

Pitch: 0.4µm

SRAM

Transistor

Interconnect

All company and product names are trademarks or

registered trademarks of their respective owners.

Printed in the U.S.A. WFS-FS-20983-7/2003

FUJITSU MICROELECTRONICS AMERICA, INC.

Corporate Headquarters

1250 E. Arques Ave. Sunnyvale, CA 94088-3470

Tel: (800) 866-8608 Fax: (408) 737-5999

E-mail: [email protected] Web Site: http://www.fma.fujitsu.com

Cell Size = 1.98µm

(1.2µm x 1.65µm)

(2nd Generation SRAM)

1.65µm

1 2

Pas de commentaire

Fujitsu CS90A Manuel d'utilisateur Page 2